SN-6 Fabrication of SOI Wafers
Fabrication of the wafer in which amorphous insulator is "buried"
underneath very thin layer of high quality single-crystal Si is
a challenging task.
SN-7 Strained Semiconductor Films
Mobility of electrons in "strained" semiconductors is higher than
in conventional "relaxed" semiconductors; incorporation of strained
layers results in faster semiconductor devices.