Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
yield  in semiconductor industry synonymous with "manufacturing yield", i.e. number defining percentage of operational devices out of all devices manufactured.
yield ramping  increase of manufacturing yield as a function of time. i.e. as a given process becomes more mature.
Term (Index) Definition
sputter yield  efficiency of the sputtering process; different for different materials.
sputtering, sputter deposition  bombardment of solid (target) by high energy chemically inert ions (e.g. Ar+)extracted from plasma; causes ejection of atoms from the target which are then re-deposited on the surface of the substrate purposely located in the vicinity of the target; common method of Physical Vapor Deposition (PVD) of metals and oxides.
sputtering, sputter etching  same as ion milling; bombardment of the target (wafer) by high energy ions (e.g. Ar+) extracted from plasma for the purpose of material removal from the target (etching); highly anisotropic, highly non-selective etching method.
Term (Index) Definition
yield ramping  increase of manufacturing yield as a function of time. i.e. as a given process becomes more mature.
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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.