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Term (Index) Definition
wet etching  etching process in semiconductor processing relying on chemical reaction in the liquid phase; highly isotropic but can be very selective.
dry etching  etching process carried out in the gas-phase; can be either purely chemical (plasma etching), purely physical (ion milling) or combination of both (Reactive Ion Etching, RIE).
etching, etch  subtractive process in the course of which a solid is either dissolved in liquid chemicals (wet etching) or converted into gaseous compound (dry etching); one among key processes in semiconductor manufacturing.
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