Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
vertical diffusion  diffusion in solids in which diffusing species are moving in a direction normal to the wafer surface.
diffusion  in general, motion of species in solids in the direction of concentration gradient; (i)diffusion of free charge carriers in semiconductor; (ii) diffusion of dopant atoms in semiconductor at elevated temperature; (iii) diffusion - common name of the high temperature process during which dopant atoms are introduced into semiconductor by diffusion.
lateral diffusion  diffusion of dopant atoms in the direction parallel to the surface of semiconductor; in general, undesired in semiconductor device manufacturing as it causes lateral distortion of the device geometry.
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