Semiconductor Glossary, Developed Semi OneSource.
Google
 


Check out the new SemiconductorGlossary.com weBLOG!



With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.












Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.


Search For Term

Term (Index) Definition
thermal budget  term defines total amount of thermal energy transferred to the wafer during the given elevated temperature operation; proportional to temperature and duration of the process; low thermal budget is desired in ultra-small IC manufacturing to prevent dopant redistribution; low thermal budget is possible even at a very high temperature if time of the process is very short (can be as short as few seconds); RTP.
RTP  Rapid Thermal Processing; general term describing type of the process in which temperature of the wafer is rapidly increased by radiant heating from high-power halogen-quartz lamps; low-thermal budget process; useful in several applications in semiconductor device processing in which high temperature exposure is needed, but transfer of the large amount of thermal energy to the wafer is not desired .
Hit Count=

Back To Top! 

Back To Home!







Hit Count=
Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.