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Term (Index) Definition
synchrotron radiation  high-intensity X-ray radiation needed to expose resist in X-ray lithography (XRL; produced as a result of electron beam bending in the state of electron synchrotron resonance.
X-ray lithography  lithography method using X-ray to expose the resist; due to shorter wavelength of X-ray radiation (0.4 - 4 nm)XRL allows higher resolution than photolithography which uses longer wavelength UV irradiation; XRL requires special mask and resists sensitive to X-rays.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.