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Term (Index) Definition
surface orientation  defines crystallographic structure of semicodnuctor surface using Miller indices; crystallographic plane along which single-crystal semiconductor ingot is cut into wafers; e.g. (100) and (111).
Miller indices  combination of three digits, either 1 or 0, e.g. (100), (111), etc.; used to define orientation of the crystallographic planes in a crystal; in other words: a set of coordinates defining specific crystallographic plane in the crystal.

Reference: See Semiconductor Notes for more information
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