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Term (Index) Definition
strained film  ultra-thin layer of single-crystal material epitaxially grown on the substrate featuring different lattice constant; pseudomorphic material; difference in lattice constant causes lattice of the deposited film to be severely strained; effective mass of electrons in strained material is reduced, and hence, their mobility is higher than in the relaxed material.
lattice mismatch  term refers to the situation where two materials featuring different lattice constants are brought together by deposition of one material on top of another; in general, lattice mismatch will prevent growth of defect-free epitaxial film unless thickness of the film is below certain critical thickness; in this last case lattice mismatch is compensated by the strain in the film.
lattice constant , a  distance between atoms in cubic-cell crystals; measure of structural compatibility of various crystals.
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