Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
steam oxidation  thermal oxidation of silicon carried out in water vapor (steam) produced by vaporization of deionized water which is then directed to the oxidation tube in which silicon wafers are located; significantly higher oxide growth rate as compared to dry oxidation; used to form relatively thick films of SiO2.
wet oxidation  thermal oxidation of silicon carried out in water vapor containing oxygen, or in steam; significantly higher oxide growth rate as compared to dry oxidation; used to form relatively thick films of SiO2 on Si surface; wet oxide contains Si-H and Si-OH, and hence, features inferior to dry oxide electrical integrity.
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