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Term (Index) Definition
spreading resistance  resistance of semiconductor defined by the distribution of dopant atoms in the direction normal to its surface.
doping  introduction of dopant into semiconductor for the purpose of altering its electrical properties; allows control of resistivity/conductivity of semiconductor by several orders of magnitude; also used to convert p-type material into n-type material and vice versa.
resistivity  resistance per unit area and unit length; expressed in ohm-cm; the reciprocal of conductivity.
Term (Index) Definition
spreading resistance profiling  technique used to determine depth distribution (profile) of dopant atoms in semiconductor substrate and a junction depth.
junction depth  depth (measured from the surface)of the plane in p-n junction at which concentration of acceptors is equal to the concentration of donors.
spreading resistance  resistance of semiconductor defined by the distribution of dopant atoms in the direction normal to its surface.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.