Semiconductor Glossary, Developed Semi OneSource.

Check out the new weBLOG!

Semiconductor Glossary book, click here to see new prices!

With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

Search For Term

Term (Index) Definition
spin cleaning  so-called "dynamic cleaning"; wafer rotated at high rpm's is subjected to interactions with cleaning solutions and DI water; single wafer process.

Reference: See Semiconductor Notes for more information
immersion cleaning  cleaning process in which wafers and cassette are completely immersed in cleaning solutions; as opposed to, for instance, spray cleaning or spin cleaning.

Reference: Akrion, Inc.
spray cleaning  batch wet cleaning process in which processed wafers are sprayed with cleaning chemicals and then rinsing water; alternative to immersion cleaning, spin cleaning, etc.

Reference: SemiOneSource,Notes, SN-17
Hit Count=

Back To Top! 

Back To Home!

Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

Hit Count=
Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.