Semiconductor Glossary, Developed Semi OneSource.
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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.












Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.


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Term (Index) Definition
spiking  uncontrolled penetration of semiconductor substrate by contact metal; problem with Al in contact with silicon; may short ultra-shallow p-n junction underneath the contact.
aluminum, contaminant, Al  common metallic contaminant in silicon processing; main source: APM cleaning solution; slows down thermal oxidation of silicon if not removed prior to oxidation; affects oxide reliability; detection and measurement on Si surface by TOF-SIMS.
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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.