Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
sodium, Na  alkaline metal; one of the most common element in the environment; sodium ions Na+ are very harmful contaminants of SiO2 in silicon processing; Na+ ion can move in SiO2 under the influence of electric field resulting in instabilities of characteristics of MOS based devices; Na+ contamination must be prevented in Si manufacturing environment.
contaminant  alien element or specie from the medium in contact with semiconductor (e.g. process gases, liquids, clean room air, etc.) which may penetrate semiconductor or adhere to its surface and which adversely affect characteristics/performance of the processed device; the most common types of contaminants in semiconductor processing: particles, organic contaminants, and metallic contaminants.

Reference: SemiOneSource,Notes
mobile charge  electrically charged species which can move in the MOS gate oxide under the influence of electric field; causes severe instabilities of MOSFET characteristics, e.g. fluctuations of the threshold voltage VT; Na+ ions are the most common mobile charges in SiO2.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.