Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
sodium, Na  alkaline metal; one of the most common element in the environment; sodium ions Na+ are very harmful contaminants of SiO2 in silicon processing; Na+ ion can move in SiO2 under the influence of electric field resulting in instabilities of characteristics of MOS based devices; Na+ contamination must be prevented in Si manufacturing environment.
contaminant  alien element or specie from the medium in contact with semiconductor (e.g. process gases, liquids, clean room air, etc.) which may penetrate semiconductor or adhere to its surface and which adversely affect characteristics/performance of the processed device; the most common types of contaminants in semiconductor processing: particles, organic contaminants, and metallic contaminants.

Reference: SemiOneSource,Notes
mobile charge  electrically charged species which can move in the MOS gate oxide under the influence of electric field; causes severe instabilities of MOSFET characteristics, e.g. fluctuations of the threshold voltage VT; Na+ ions are the most common mobile charges in SiO2.
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.