Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.

Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
silicon precursor  silicon containing compound used as a source of silicon in deposition processes; e.g. SiH4 in various CVD of silicon steps.
silane, SiH4  gaseous compound; the most common source of silicon in CVD processes of Si, SiO2 and Si3N4; thermally decomposes at about 900 oC; toxic and explosive in contact with oxygen.
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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.