Semiconductor Glossary, Developed Semi OneSource.
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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.












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Term (Index) Definition
silicon precursor  silicon containing compound used as a source of silicon in deposition processes; e.g. SiH4 in various CVD of silicon steps.
silane, SiH4  gaseous compound; the most common source of silicon in CVD processes of Si, SiO2 and Si3N4; thermally decomposes at about 900 oC; toxic and explosive in contact with oxygen.
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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.