Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
silicon oxidation  term commonly refers to the processof thermal oxidation which forms a thin layer of SiO2 on silicon surface.
thermal oxidation, thermal oxide  growth of native oxide of the solid through oxidation of solid's surface at elevated temperature; results from chemical reaction of host atoms with oxygen containing ambient; thermal oxidation of silicon results in a very high quality silicon dioxide, SiO2, formed on the silicon surface; most other semiconductors do not form device quality thermal oxide, hence, term "thermal oxidation" is almost synonymous with "thermal oxidation of silicon".

Reference: Thermal oxidation of silicon.
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