Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.

Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
shallow junction  term typically refers to a depth of the source and drain regions in advanced CMOS; scaling rules require continued reduction of the junction depth; can be as shallow as 10 nm.
scaling rules  design rules which must be followed while scaling down geometry of integrated devices and interconnect lines; arbitrary reduction of key geometries, e.g. channel length in MOSFETs, may results in dysfunctional devices, e.g. short-channel effects in MOSFET.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.