Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
shadowing effect  effect preventing conformal coating of surface features during physical vapor deposition; e.g. evaporated metal reaching the surface under certain angle will not uniformly coat vertical walls and bottom of a trench.
evaporation  common technique used to deposit thin film materials; material to be deposited is heated in vacuum, 10-6 Torr - 10-7 Torr range, until it melts and starts evaporating; vapor of material is condensing on the cooler substrate exposed to the vapor; common technique in thin film metal deposition; not suitable for high melting point materials; one of the PVD (Physical Vapor Deposition) methods of thin film formation.
conformal coating  deposited film which thickness remains the same regardless of the geometry of underlying features.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.