Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
selective etching  etching processes in which one material is etched rapidly while the other is etched very slowly or not etched at all; Example - HF:water solution is etching SiO2 very rapidly while not etching silicon.
anisotropic etch  etch in which etch rate in the direction normal to the surface is much higher than in direction parallel to the surface; no undercutting i.e. lateral distortion of pattern is minimized; needed to define very tight geometries.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.