Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
sSOI,  strained SOI, i.e. Silicon-on-Insulator substrate with strain introduced in the lattice of an active Si layer.
strained film  ultra-thin layer of single-crystal material epitaxially grown on the substrate featuring different lattice constant; pseudomorphic material; difference in lattice constant causes lattice of the deposited film to be severely strained; effective mass of electrons in strained material is reduced, and hence, their mobility is higher than in the relaxed material.
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