Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.

Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
rotagoni drying  Marangoni drying combined with rotation of the wafer.
drying  process of removing water and moisture from the wafer surface.
Marangoni drying  wafer drying technique; wafer is gradually withdrawn from water into the vapor of isopropyl alcohol (IPA) and nitrogen; due to the gradient of surface tension water from the surface of the wafer is pulled back into the body of water leaving emerging surface free of any moisture.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.