Semiconductor Glossary, Developed Semi OneSource.
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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.












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Term (Index) Definition
raster scan  scanning mode in which beam is moving back and forth over the entire substrate; beam is turned on over designated area and then turned off until it will arrive at the next designated area.
variable shape beam  scanning mode in e-beam lithography in which shape of the beam is changing depending on the geometry of exposed area.
vector scan  scanning mode in which beam is scanning selected areas only; after scanning of selected area is completed beam is turned off and moved to another area to be scanned.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.