Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
preferential etching  etching occuring preferentially along selected crystallographic plane in the crystalline solid.
anisotropic etch  etch in which etch rate in the direction normal to the surface is much higher than in direction parallel to the surface; no undercutting i.e. lateral distortion of pattern is minimized; needed to define very tight geometries.
isotropic etch  etch in which rate of etching reaction is the same in any direction; non-directional.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.