Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.

Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
plasma etching  dry etching in which semiconductor wafer is immersed in plasma containing etching species; chemical etching reaction is taking place at the same rate in any direction, i.e. etching is isotropic; can be very selective; used in those applications in which directionality (anisotropy) of etching in not required, e.g. in resist stripping.
dry etching  etching process carried out in the gas-phase; can be either purely chemical (plasma etching), purely physical (ion milling) or combination of both (Reactive Ion Etching, RIE).
etching, etch  subtractive process in the course of which a solid is either dissolved in liquid chemicals (wet etching) or converted into gaseous compound (dry etching); one among key processes in semiconductor manufacturing.
Reactive Ion Etching, RIE  variation of plasma etching in which during etching semiconductor wafer is placed on the RF powered electrode; wafer takes on potential which accelerates etching species extracted from plasma toward the etched surface; chemical etching reaction is preferentially taking place in the direction normal to the surface, i.e. etching is more anisotropic than in plasma etching but is less selective; leaves etched surface damaged; the most common etching mode in semiconductor manufacturing.
plasma  ionized gas, specifically a self-contained part of the electrical discharge in gases featuring equal concentration of ions and electrons; plasma contains electrically active species, but as a whole is electrically neutral; ions can be extracted from plasma to play variety of important functions in semiconductor processing.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.