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Term (Index) Definition
photoemulsion mask  mask used in photolithography which uses thin fim of photoemulsion as an opaque material.
photolithography, optical lithography  pattern definition method which uses UV radiation to expose the resist; the most common lithography technique in semiconductor manufacturing; using extremely short wavelength UV (extreme UV; wavelenghts below 200 nm), projection printing (steppers), phase shift masks, and adequate resist technology photolithography is capable of resolution below 100 nm.
photoemulsion  material acting as an opaque (nontransparent to UV radiation) part of the masks used in photolithography; inferior to chrome, used for the same purpose, due to lower optical density (thicker film needed to block off UV radiation) grainy structure (not as sharp edges as in the case of chrome) and softness making it vulnerable to mechanical damage.
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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

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