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Term (Index) Definition
phase shifter,  a thin layer of material added to the transparent parts of the photomask for the purpose of shifting phase (typically by 180o) of the passing light; thickness of the "shifter" depends on the wavelength of radiation used for exposure and refractive index of the material used (e.g. quartz, Si3N4, or photoresist)
phase shift mask, PSM  a conventional mask to which layer of material featuring desired refractive index and thickness is locally added in order to shift phase of light passing through transparent portion of the mask; phase shifting increases resolution of pattern transfer by destructive interference preventing resist exposure in the regions in which it should not be exposed.
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