Semiconductor Glossary, Developed Semi OneSource.

Check out the new weBLOG!

Semiconductor Glossary book, click here to see new prices!

With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

Search For Term

Term (Index) Definition
phase shift mask, PSM  a conventional mask to which layer of material featuring desired refractive index and thickness is locally added in order to shift phase of light passing through transparent portion of the mask; phase shifting increases resolution of pattern transfer by destructive interference preventing resist exposure in the regions in which it should not be exposed.
mask  device used to shape desired geometries on the surface of the wafer; Examples: (i)photomask; allows selective irradiation of resist on the wafer surface by blocking irradiation in selected areas; consist of opaque (non-transparent to given wavelengths) and blank (transparent) parts; in photolithography chrome, and quartz respectively; (ii)mechanical (shadow) mask; a thin sheet of metal with properly shaped holes; sometimes used to define crude geometries on the surface of the wafer during physical vapor depositions.
mask, photolithography  see photomask
enhancement techniques  term typically refers to techniques employed to extend use of photolithography into sub-100 nm regime; e.g., phase-shift masks, immersion photolithography, new photoresist formulations, etc.
Hit Count=

Back To Top! 

Back To Home!

Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

Hit Count=
Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.