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Term (Index) Definition
passivation  rendering inactive; term typically refers to the procress in which chemically and electrically active broken bonds at the semiconductor surface are saturated, and hence de-activated, by reaction with selected element; e.g. hydrogen passivates broken Si bonds at the surface; oxide grow on Si surface passivates it as well.
Term (Index) Definition
surface passivation  termination of bonds on the semiconductor surface with elements assuring chemical stability of the surface; surface is rendered chemically "passive"; e.g., hydrogen termination of bonds on the silicon surface will prevent oxidation of the surface; oxidation of Si surface bonds will also passivate the surface.
hydrogen termination  broken silicon bonds on the surface are saturated with hydrogen; Si-H is a stable bond preventing oxidation of silicon at room temperature.
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