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Term (Index) Definition
overetchig  etching process lasting longer than the time required to etch entirely material of interest; may result in undesired lateral expansion of the etched pattern; end-point detection needed to prevent overetching.
endpoint  during etching operations point in time when etching of material is completed and continuation of etching results in overetching.
endpoint detection  during gas-phase etching determination of the point in time at which etching is completed; common methods are based on interferometry or spectral analysis of etching plasma.
laser interferometry  end point detection method in dry etching tools; completion of the etching process is determine based on the detection of change in optical characteristics of laser beam reflected from the etched surface.
optical emission spectroscopy, OES  method of end point detection in dry etching processes; end point is detected based on the changes in the spectrum of radiation emitted by plasma.
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