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Term (Index) Definition
multilevel interconnect, MLI  interconnect scheme in integrated circuits implemented in several levels; metal lines are stacked into several levels (as many as ten and more), are electrically isolated by interlayer low-k dielectric, and are vertically interconnected through vias; MLI is needed to save space on the surface of the chip and to reduce RC losses in very high density integrated circuits.
copper, Cu  (i) metal of choice for interconnects in advanced ICs; resistivity the lowest among metals - 1.7 µohm-cm; advantages over aluminum: no electromigration and lower resistivity; (ii) defect causing contaminant if allowed to penetrate silicon; very fast diffusant in silicon; results in reduced lifetime of minority carriers.
multilevel metallization  see "multilevel interconnect"
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