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Term (Index) Definition
multilayer resist  in order to improve resolution of the pattern transfer process more than one layer of resist are used; in the simple version of such scheme bottom (thicker) layer planarizes surface while top (very thin)layer acts as an imaging resist .
planarization  process of flatting of the surface of the wafer; done either by deposition of additional material and back polishing it, or by deposition and re-flowing of SiO2 doped with P and B (BPSG), or by depositing thick layer of resist.
imaging resist  layer of photoresist in which photochemical reactions resulting from irradiation are taking place; as the wavelength of radiation is getting shorter, and hence absorption coefficient increases, thickness of imaging resit is gradually reduced.
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