Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
minienvironment  ultra-clean environment created within the limited space surrounding individual process tool and not in the entire clean room; sealed off SMIF boxes are used to move wafers from one tool/minienvironment to another; much more economical approach to semiconductor manufacturing than "ballroom" approach in which ultra-clean environment is created in the entire room.
SMIF  Standard Mechanical InterFace; standard adopted by the industry for a purpose of facilitating wafer transport between "minienvironments".
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.