Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
mass flow controller, MFC  mass flow controller; an instrument installed in the gas delivery lines in semiconductor equipment to control the amount of gas delivered to process chamber; the flow is typically measured in sccm.
sccm  standard centimeter cube per minute; common unit of gas flow in semiconductor equipment; 1 cm3 of gas per minute at 0 oC and at atmospheric pressure.
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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.