Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
mask, X-ray lithography  see X-ray mask.
X-ray mask  mask used in X-ray lithography; uses gold as an opaque material; gold pattern (defined using e-beam lithography) is supported by a thin membrane made out of material transparent to X-rays of given wavelength, e.g. Si3N4, SiC and others.
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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.