Semiconductor Glossary, Developed Semi OneSource.
Google
 


Check out the new SemiconductorGlossary.com weBLOG!

Semiconductor Glossary book, click here to see new prices!


With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.












Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.


Search For Term

Term (Index) Definition
lamp cleaning  brief exposure of semiconductor wafer to halogen-quartz lamp illumination in oxygen containing ambient for the purpose of increasing wafer temperature up to 300 oC resulting in volatilization of surface organic contaminants.

Reference: SemiOneSource,Notes
organic contaminant  in semiconductor processing mainly hydrocarbons from resist/etching processes, ambient air, storage environment, shipping boxes, etc.; if not controlled may cause reliability problems in MOS devices as well as have an adverse effect on the characteristics of metal-semiconductor contacts and epitaxial layers; removal accomplished using strongly oxidizing ambient both wet and dry.
RTC  Rapid Thermal Cleaning; brief increase of wafer temperature for a purpose of volatilization of surface contaminants, (primarily organics)and moisture; typically carried out at temperatures below 300 o in oxidizing ambient, e.g. air, at atmospheric pressure.
Hit Count=

Back To Top! 

Back To Home!







Hit Count=
Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.