Semiconductor Glossary, Developed Semi OneSource.
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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.












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Term (Index) Definition
ion beam  geometrically confined and accelerated by electrostatic forces stream of ions directed toward desired target.
ion sputtering, milling  etching process; process in which high energy ions impinging on the surface of the solid cause ejection ("sputtering") of the host atoms; highly anisotropic and non-selective etching.
Term (Index) Definition
ion beam lithography, IBL  lithography technique in which resist is exposed by accelerated ions; due to the limited scattering of ions in the resist IBL may offer higher resolution than e-beam lithography.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.