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Semiconductor Glossary book, click here to see new prices!
With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.
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Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.
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Term (Index)
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Definition
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interconnect density,
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a measure of complexity of a multi-level metallization scheme in advanced ICs; expressed in m/cm2/level.
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Term (Index)
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Definition
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multilevel interconnect, MLI
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interconnect scheme in integrated circuits implemented in several levels; metal lines are stacked into several levels (as many as ten and more), are electrically isolated by interlayer low-k dielectric, and are vertically interconnected through vias; MLI is needed to save space on the surface of the chip and to reduce RC losses in very high density integrated circuits.
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copper, Cu
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(i) metal of choice for interconnects in advanced ICs; resistivity the lowest among metals - 1.7 µohm-cm; advantages over aluminum: no electromigration and lower resistivity;
(ii) defect causing contaminant if allowed to penetrate silicon; very fast diffusant in silicon; results in reduced lifetime of minority carriers.
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multilevel metallization
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see "multilevel interconnect"
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.
This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.
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