Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
heavily charged ion, HCI  same as multicharged ion

Reference: XionTec
ion multicharged, MCI  an ion featuring ion charge q>1; e.g. Ar8+; high power, very high frequency generators are needed to ionize gas to ion charge >1; decelerated multicharged ions feature potential energy orders of magnitude higher than their kinetic energy; capable of interacting with solid surfaces at ultra-low velocities; in contrast to non-selective interactions of single charge ions the multicharged ions interact differently with insulator and conductors

Reference: X-Ion
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.