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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.












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Term (Index) Definition
furnace vertical  furnace for high temperature processing of semiconductor wafers in which process tube is positioned vertically and wafers are located horizontally inside the tube; superior to horizontal furnace in terms of heating uniformity, compatible with automatic wafer loading and footprint; warpage of horizontally supported wafers must be prevented; batch processor.
furnace horizontal  furnace for high temperature processing of semiconductor wafers in which process tube is positioned horizontally and wafers are located in the boat vertically on their edges; used for thermal oxidation, CVD, diffusion, and anneals; batch processor; an alternative configuration: vertical furnace.
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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.