Semiconductor Glossary, Developed Semi OneSource.
Google
 



Check out the new SemiconductorGlossary.com weBLOG!

Semiconductor Glossary book, click here to see new prices!


With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Sponsors


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.


Search For Term

Term (Index) Definition
furnace horizontal  furnace for high temperature processing of semiconductor wafers in which process tube is positioned horizontally and wafers are located in the boat vertically on their edges; used for thermal oxidation, CVD, diffusion, and anneals; batch processor; an alternative configuration: vertical furnace.
batch process  process in which several wafers are processed at the same time; opposite to single wafer process; e.g. thermal oxidation in the furnace (either horizontal or vertical) is a prime example of the batch process.
furnace vertical  furnace for high temperature processing of semiconductor wafers in which process tube is positioned vertically and wafers are located horizontally inside the tube; superior to horizontal furnace in terms of heating uniformity, compatible with automatic wafer loading and footprint; warpage of horizontally supported wafers must be prevented; batch processor.
Hit Count=

Back To Top! 

Back To Home!






Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.



This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.


Hit Count=
Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.