Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
fixed charge  see oxide fixed charge.
mobile charge  electrically charged species which can move in the MOS gate oxide under the influence of electric field; causes severe instabilities of MOSFET characteristics, e.g. fluctuations of the threshold voltage VT; Na+ ions are the most common mobile charges in SiO2.
Term (Index) Definition
fixed charge  charge in Si-SiO2 structure; located in the oxide in the immediate vicinity of Si surface; does not move and exchange charge with Si (hence, "fixed"); associated with incompletely oxidized silicon, or in other words, with excess silicon; f.c. alters characteristics of Si-SiO2 based MOS gate stacks.
mobile charge  electrically charged species which can move in the MOS gate oxide under the influence of electric field; causes severe instabilities of MOSFET characteristics, e.g. fluctuations of the threshold voltage VT; Na+ ions are the most common mobile charges in SiO2.
Term (Index) Definition
oxide fixed charge, Qf  charge in Si-SiO2 structure; located in the oxide in the immediate vicinity of Si surface; does not move and exchange charge with Si, hence, "fixed"; associated with incompletely oxidized silicon or in other words, with excess silicon; lower density at higher temperature of oxidation; can be lowered by post-oxidation anneal in N2 or Ar; fixed charge alters characteristics of Si-SiO2 based MOS gate stacks.
dangling bond  unsaturated (broken) interatomic bond at the semiconductor surface; electronically active; can interact with charge carriers in semiconductor.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.