Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
exposure  irradiation of resist with radiation of adequate wavelength (UV in the case of photolithography) for the purpose of stimulating desired photo-chemical reactions in the layer of resist.
Term (Index) Definition
full-field exposure  exposure of the entire wafer during photolithography processes through properly designed mask; used in contact and proximity printing; as oposed to step-and-repeat exposurep process used in steppers.
contact printing  photolithographic process in which during illumination mask and a wafer are in physical contact; allows resolution below 1 micrometer depending on the wavelength of radiation but may cause mask damage; in advanced microelectronic manufacturing replaced with projection printing (steppers).
proximity printing  exposure techniques used in photolithography in which during exposure mask is not in contact with resist (is separated from the wafer surface by some 20 m); mask damage is less likely than during contact printing, but resolution of pattern transfer is limited to about 2 m.
step and repeat projection  resist exposure mode in lithographic processes in which the same pattern is projected on the surface of the wafer in the series of consecutive exposures instead of the exposure of the entire wafer.
Term (Index) Definition
selective exposure  foundation of pattern definition using lithographic process; only selected areas of the resist are exposed to radiation; accomplished either by using masks or by localizing exposure using finely focused beam.
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Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.