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Term (Index) Definition
etch anisotropy  etching is taking place preferentially in one direction; key requirement in definition of very fine geometrical features.
anisotropic etch  etch in which etch rate in the direction normal to the surface is much higher than in direction parallel to the surface; no undercutting i.e. lateral distortion of pattern is minimized; needed to define very tight geometries.
isotropic etch  etch in which rate of etching reaction is the same in any direction; non-directional.
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