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Term (Index) Definition
epitaxial layer  layer grown in the course of epitaxial deposition, or epitaxy; its crystallographic structure reproduces structure of the substrate but doping level and conductivity type of epitaxial layer is controlled independently of the substrate; e.g. can be made chemically purer than the substrate; silicon substrates with epitaxial layers are commonly used in CMOS and bipolar device technology.
epitaxy  process by which thin layer of single-crystal material is deposited on single-crystal substrate; epitaxial growth occurs in such way that the crystallographic structure of the substrate is reproduced in the growing material; also crystalline defects of the substrate are reproduced in the growing material.
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