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Term (Index) Definition
epitaxial lateral overgrowth, ELO  local epitaxial growth which initially occurs in the direction normal to the surface of the substrate but then proceeds preferentially in the direction parallel to the surface of the substrate; vertical growth starts from the single-crystal seed area but lateral growth may continue over non-crystalline portion of the substrate.
epitaxy  process by which thin layer of single-crystal material is deposited on single-crystal substrate; epitaxial growth occurs in such way that the crystallographic structure of the substrate is reproduced in the growing material; also crystalline defects of the substrate are reproduced in the growing material.
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