Semiconductor Glossary, Developed Semi OneSource.
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Term (Index) Definition
electron beam (e-beam) evaporation  material is evaporated as a result of highly localized heating by bombardment with high energy electrons generated in an electron gun and directed toward the surface of source material confined in the crucible; evaporated material is very pure; bombardment of metal with electrons is accompanied by generation of low intensity X-rays which may create defects in the oxide present on the surface of the substrate; typically, an anneal is needed to eliminate those defects.
Physical Vapor Deposition, PVD  deposition of thin film occurs through physical transfer of material (e.g. thermal evaporation and sputtering)from the source to the substrate; chemical composition of deposited material is not altered in the process.
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