Semiconductor Glossary, Developed Semi OneSource.
Google
 



Check out the new SemiconductorGlossary.com weBLOG!

Semiconductor Glossary book, click here to see new prices!


With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Sponsors


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.


Search For Term

Term (Index) Definition
dry cleaning  process of contaminants removal from the wafer surface in the gas-phase; driven by either conversion of contaminant into volatile compound through chemical reaction, or its "knocking" off the surface via momentum transfer, or lift-off during slight etching of contaminated surface.

Reference: See Semiconductor Notes for more information
cryogenic aerosol  high velocity frozen particles of inert gas such as CO2 or Ar; used to remove particles from the wafer surface.
UV/Cl2  UV irradiation of Si surface in Cl2 ambient at the reduced pressure and wafer temperature not exceeding 200 oC; part of silicon dry cleaning scheme; results in volatilization of several metallic contaminants of Si surface and slight etching of silicon.
Hit Count=

Back To Top! 

Back To Home!






Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.



This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.


Hit Count=
Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.