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Term (Index) Definition
double patterning  see multiple patterning.
multiple patterning  an approach to patterning of features in advanced ICs which are 32 nm half-pitch and below; allows an increase of feature density without having to improve resolution of the pattern transfer process; double patterning is the most common version of multiple patterning; in conjunction with immersion photolithography extends applicability of 193 nm exposure tools.
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