Semiconductor Glossary, Developed Semi OneSource.

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With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.

Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

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Term (Index) Definition
diffusion pump  high vacuum pump (from 10-3 torr to 10-7 torr) featuring relatively high pumping speed; in the past the most common high vacuum pump in semiconductor processing; with time eliminated from mainstream applications because of the oil vapor backstreaming into the vacuum system.
rough, roughing, pump  vacuum pump designed to reduced pressure from atmospheric to militorr range.
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Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.