Semiconductor Glossary, Developed Semi OneSource.

Check out the new weBLOG!

Semiconductor Glossary book, click here to see new prices!

With over 2000 terms defined and explained, Semiconductor Glossary is the most complete reference in the field of semiconductors on the market today.


Including some 500 new terms defined and remaining terms updated and modified, a 2nd edition book version of this glossary is now available.

Search For Term

Term (Index) Definition
depth profiling  materials characterization method allowing determination of distribution of elements in the solid in the direction normal to its surface; common in conjunction with SIMS, Auger electron spectroscopy and other methods of surface analysis; profiling is accomplished by simultaneous gradual removal of material using ion milling and analysis of its chemical composition; d.p. is broadly used in semiconductor R&D.
Auger Electron Spectroscopy, AES  surface characterization and depth profiling method based on the determination of the energy of Auger electrons ejected from the solid surface bombarded with high energy ions; only elements with atomic number > 2 can be detected.
SIMS  Secondary Ion Mass Spectroscopy; material characterization method; atoms sputtered off the surface are identified by determination of their mass (mass spectroscopy); conventional dynamic SIMS features high sputtering rate while static SIMS uses extremely low sputtering rate allowing better sensitivity to the characteristics of the very surface; allows depth profiling.
Hit Count=

Back To Top! 

Back To Home!

Jerzy Ruzyllo is a Distinguished Professor Emeritus in the Department of Electrical Engineering at Penn State University.

This book gives a complete account of semiconductor engineering covering semiconductor properties, semiconductor materials, semiconductor devices and their uses, process technology, fabrication processes, and semiconductor materials and process characterization.

Hit Count=
Created and operated by J. Ruzyllo. Copyright J. Ruzyllo 2001-2016. All rights reserved.

Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.