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Term (Index) Definition
deionized water, DI water  ultra-pure water used in semiconductor manufacturing; produced by removing all ions of dissolved minerals using reverse osmosis and ion-exchange systems; DI water should also be free from particles, bacteria, organics, and dissolved oxygen; purity of deionized water is determined based on its resistivity; target resistivity is 18 megaohm-cm.
ozonated water  water with ozone dissolved in it to increase its oxidizing strength; commonly used in semiconductor processing to remove organic contaminants from the wafer surface.
rinsing  process in which wafer is immersed in deionized water in order to stop chemical reaction initiated during preceding operation and to remove products of this reaction from the surface.
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Information in this glossary is provided at the author's discretion. Any liability based on, or related to the contents of this glossary is disclaimed.